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Fig 128: Gallium arsenide ions etched in Freon 12 (the mask used for the ridges was made of nickel-chrome
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and was formed by a lift-off pattern in a PMMA resist) [3]
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Photo-etching Photo-etching is a technique, which is found to be the most effective for the microengineering manufacture of parts such as ink-jet nozzles and miniature pressure sensors as shown in Figure 129 This technology relies heavily on the anisotropic etching characteristics of silicon [3]
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Fig 129: (a) An ink-jet nozzle produced by photo etching and (b) a method of micropressure sensorphoto-etching [2]
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Ultra-precision machining processes fall under the nanotechnology regime Ion beam machining, is a process that functions at the atomic level, is known to be an ultra-precision machining process This inert gas ion process employs argon ions or other inert gas ions such as Kr and Xe at high kinetic energy levels of the order of 10 KeV to bombard and erode the surface of the workpiece By these means, the parent atoms are ejected by collision and emission by a phenomenon known as the ion sputter The penetration depth of an ion at 1 KeV as estimated from electron diffraction patterns is about 5 m The method neither generates heat to an intolerable level since the material removed is in units of atoms and in a random manner nor does it cause any significant mechanical strain damage in the machined surface layer Some of the argon ions are retained, substituting displaced workpiece atoms This process has a machining resolution of about 10 nm The ion-beam milling process (Figure 130), which uses a DC discharge, is a good example of an energy beam machining process
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Fig 130: A model of the ion beam machining/sputtering process [1]
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110 THERMAL CONSIDERATIONS
PRECISION ENGINEERING
As temperature variations can affect the accuracy of a process [20, 22], manufacturing engineers must pay attention to these variations when there is a need for accuracy and precision The thermal expansion of the components of a machine tool, which causes distortion, is an important factor that controls the precision of a machine tool The sources of heat may originate internally such as in bearings; machine ways, motors, and heat generated from the cutting zone, or may be external, such as from nearby furnaces, heaters, sunlight, and fluctuations in cutting and ambient temperature [6] The use of high-speed machining spindles with a coolant supply such as the one shown in Figure 131 is desirable [21] These considerations are particularly important in precision and ultra-precision machining, including diamond turning, where dimensional tolerances and surface finish have to necessarily be in the nanorange
Nozzle
Fig 131:
A high-speed spindle with a coolant supply minimizes temperature variations [21]
Precision component manufacturing increasingly requires specifying tolerances on some component features that are so rigid that mere shop floor or operation-induced temperature changes can cause measured dimensions to vary significantly Dimensions are usually specified at 20 C because ISO1 fixes the standard reference temperature for industrial length measurements at 20 C A workpiece or gauge departing from this temperature by even a few degrees can result in unexpected changes in critical dimensions For example, a gauge that reads 7533 mm, say, 30 times in succession while measuring a 7520 mm diameter will have a remarkable repeatability precision but will not give accurate readings It then becomes necessary to make a compensation for deviations from the reference temperature (20 C) as environmental conditions can also affect precision measurements
111 REFERENCES
1 Nakazawa, H, Principles of Precision Engineering, Oxford University Press, USA, 1994 2 Taniguchi, N, The state of the art of nanotechnology for processing of ultra precision and ultra fine products , Journal of the American Society of Precision Engineering, 1994, Vol16, No1, 5 24
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