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Fig 818: A comparison of the size of a microgear Fig 819: A micromotor with a 700 m rotor [6, 10]
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revolutions per minute with a lifetime up to 100 million rotations [5] In addition, microoptical components are used for high-speed signal transmission in the telecommunication industry Figure 821 shows an array of microlenses made from a transparent polymer for endoscopy applications
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Fig 820: A microturbine with a rotor Fig 821: A comparison of the microlenses of an endoscope with
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having a 130 m diameter [6, 10] a match stick [6, 11]
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Silicon pressure sensors developed by Lucas Novasensor, IC Sensors, Motorola Inc and Honeywell s Microswitch are used in process control, automotive, aerospace, medical and consumer product industries Work is underway in various research institutions to produce more MEMS devices for different applications For instance, universities in the United States are trying to develop air-driven microelectromechanical generators, atomic-force microscopes and microgrippers for application in micron-sized structures [9]
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851 Application of MEMS in Automobiles
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Automobiles present one of the largest commercial markets for MEMS devices Figure 822 shows the various MEMS devices that are used in a car MEMS and microsystems are used mainly to make automobiles safer and more comfortable for riders and to meet the high fuel efficiencies and low emission standard required by governments This has led to the birth of what is termed as smart vehicles that are based on the extensive use of sensors and actuators In addition, microsensors and actuators allow automobile manufacturers to make miniature autonomous robotic vehicles and electric cars (Figure 823) Microsystems and MEMS are applied in major areas such as safety gadgets, engine and power trains, comfort and convenience and vehicle diagnostics and health monitoring [6] The most popular safety example of MEMS in an automobile is the accelerator air-bag sensor which is commonly produced by surface micromachining (Figure 824) The sensor is used to determine exactly when the bag should be deployed to prevent injury to the driver or the passenger It is a
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Microelectro-mechanical Systems (MEMS)
Airbag side impact sensor Micromachined accelerometer for airbag Fuel pressure sensor Microphone for noise cancellation
Inertial navigation sensors Acceleration Yaw rate Silicon nozzles for fuel injection
Fuel sensor Level Vapor pressure
50 m Air conditioning compressor sensor Manifold air pressure sensor Mass air flow sensor
Crash sensor
Exhaust gas sensor
Force sensors Brakes Theottle pecials Pressure and inertial sensors for breaking control
Accelerator for suspension control
Tire pressure sensors
Fig 822: Various applications of MEMS in an automobile [2]
comb-like structure in which cantilevered beams are interdigitated with a row of electrically charged fixed plates that are deposited on a silicon wafer The beams are also joined to form a single suspended frame, which deflects on the chip in response to acceleration An increase or a decrease in the speed makes the beams vibrate between the fixed plates, generating changes in capacitance between the separate structures These changes are sensed electrically and processed by using control electronics, which calculate how much voltage is needed to keep the beams from moving The voltage is proportional to the acceleration or deceleration the sensor is experiencing and is applied to the cantilevered beams as a balance [9] The application of the accelerometer is not only limited to the air-bag system It can be also used as antilock braking systems, active suspensions or disk drives for portable computers Other microsystems for the purpose of safety in an automobile include microgyroscopes for navigation and pressure and displacement sensors for object avoidance In an automobile engine, manifold control with pressure sensors, airflow control, exhaust gas analysis and control, crankshaft positioning, fuel pump pressure and fuel injection control, transmission
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Fig 823: A miniature electric car on a match stick [6]
force and pressure control and engine knock detection for a higher power output are a few of the more commonly used microsensors [6, 12] The manifold absolute pressure (MAP) sensor was one of the first microsensors adopted by the automotive industry way back in the early 1980s It monitors the manifold absolute pressure and engine speed to optimize the power performance of the engine by controlling the air and fuel ratio For comfort and convenience, various MEMS devices such as displacement sensors, airflow, humidity, temperature and microvalves are used for achieving seat control, the rider s comfort, as a security measure, sensors for defogging of windshields and satellite navigation purposes In terms of vehicle diagnostics and health monitoring, engine coolant temperature and quality, engine oil pressure,
Fig 824: An accelerator used in an automobile air-bag deployment system [6]
Microelectro-mechanical Systems (MEMS)
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