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Print Data Matrix 2d barcode in Software Fig 825: Components of an accelerometer The typical specifications are presented in Table 82

Fig 825: Components of an accelerometer The typical specifications are presented in Table 82
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Table 82
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Criteria
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Accelerometer specifications [8]
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Specification 55 C to +125 C + 5 V ( 5%) 50 g +18 V +18 V ( 12 V) at 50 g +025 V to +475 V 5% of full scale 05% of full scale Dc to 1 kHz 024% of full scale 048% of full scale 2% 2000 g
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Temperature range Power supply Measurement range Preamp zero-g output level Preamp output span Uncommitted amp output range Overall accuracy Linearity Bandwidth Voltage noise (p p) At BW = 03 kHz At BW = 10 kHz Transverse sensitivity Unpowered shock survival
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level and quality, tyre pressure, brake oil pressure, transmission fluid and fuel pressure are monitored by the various microsystems MEMS components in the automotive industry are required to go through stringent testing These devices are tested for their endurance as they are expected to perform in harsh environmental conditions
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852 Application of MEMS in the Health-care Industry
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Micromachined structures are emerging as useful instruments in the fields of medicine and surgery as precision sensing is crucial and can be a matter of life and death Various types of biosensors shown in Figure 826 are useful for different functions One example is the electrochemical sensor array developed by Teknekron Sensor Development Corp The biosensor is small enough to fit inside a blood vessel and can measure the levels of oxygen, carbon dioxide and pH of the blood [9] The development of micromachined neural probes
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Intracranial pressure sensor Blood pressure sensor Visual prothosis Auditory prothosis
IV Line
IV Line
Blood pressure sensor Drug infusion Pumps Valves
Cortical probe Pacemaker Accelerometer Drug sensor Pressure sensor Joint angia sensor
Bladder stimulator Readout Smart musculoskeletal prothosis
Muscle stimulator
Fig 826: A micromachined transducer for application in medical treatment and diagnostics [2]
Microelectro-mechanical Systems (MEMS)
allows the sensor to record impulses from one site in the brain at a time With further advancement, there is a possibility of examining the brain structure at the circuitry level to get a better understanding of neural disorders which can lead to treatment being given properly [9] Disposable blood pressure transducers (DPT), intrauterine pressure sensors (IUP), angioplasty pressure sensor, micrototal analysis systems ( TAS), DNA sequencing chips, drug delivery systems (Figure 827) and infusion pump pressure sensors are a few examples of the tested biomedical MEMS and Microsystems Furthermore, microsystems are also used for Fig 827: Bio MEMS [4] making diagnostic and analytical systems, kidney dialysis equipments, health-care support systems, medical process monitoring and sphygmomanometers [6]
853 Application of MEMS in Defence
The use of microsystems and MEMS devices for defence applications is well documented by the DARPA (Defense Advanced Research Projects Agency) [13] A few important examples are given by Michalicek as follows [2]:Inertial navigation on a chip for munition guidance and independent personal navigation Distributed unattended sensors for asset tracking, border control, environmental monitoring, security surveillance and process control Integrated fluidic systems for miniature analytic instruments, hydraulic and pneumatic systems, propellant and combustion control Weapon safing, arming and fuzing to replace current warhead and weapon systems to improve safety, reliability and long-term stability Embedded sensors and actuators for condition-based maintenance of machines and vehicles, on-demand amplified structural strength in lower-weight weapon systems and platforms and disaster-resistant buildings Mass data storage devices for storage densities of terabytes per square centimetre Integrated microoptomechanical components for identify-friend-or-foe (IFF) systems, displays and fibre-optics switches and modulators Active and conformable surfaces for distributed aerodynamic control of aircraft, adaptive optics systems, precision parts and material handling
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854 Application of MEMS in the Aerospace Industry
Applications of MEMS in the aerospace industry is not limited only to planes but to spacecrafts also For an airplane, MEMS are usually used in cockpit instruments, safety devices, wind tunnel instrumentation, sensors for fuel efficiency and safety, microgyroscopes for navigation and stability control and microsatellites [6] The applications of MEMS in space hardware can be seen in command and control systems, inertial guidance systems, attitude determination and control systems, power systems, propulsion systems, thermal control systems, communication and radar systems and space environment sensors [14] Mass flow control is commonly used in micromachined unmanned airborne vehicles (UAV) In this section, a microgyroscope is taken as an example as this has been mentioned a few times in the text Gyroscopes are devices to measure the angular velocity and are usually found in aircraft The MEMS vibrating mass gyroscopes are aimed at creating smaller and more sensitive devices There are four main types of microgyroscopes, namely, tuning fork gyroscopes, vibrating ring gyroscopes, macro laser ring gyroscopes GPDS insole and the piezoelectric plate gyroscopes The MEMS gyroscope requires a lower drive voltage with a good sensitivity and versatility as it can measure rotation in two directions [15] In addition to being used for conventional functions, MEMS gyroscopes are also used in conjunction with a programmable Functional Electrical Simulation (FES) to help people with a dropped-foot walking FSR Gyro FSR dysfunction (Figure 828) MEMS microcontroller gyroscopes are also used in military applications for Global Positioning Fig 828: A gail phase detection sensor for foot dysfunction [15] Devices and as an inertial measurement unit
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