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MEMS is seen to have the potential for making a revolutionary impact on future society The aim is to produce stand-alone systems complete with actuators, drive and control electronics and a sensing mechanism for feedback The efforts are directed towards producing MOEMS devices that incorporate optical detectors into a system that also includes magnetic and electronics features [9] Recent research is being focused on the application of MEMS in a harsh environment and MEMS/nanohybrid systems (NEMS) The main challenge in producing microsystems arises from the fact that microstructures behave very differently from machines that perform similar tasks at the macroscale level At the microscopic level, larger electrostatic fields can be used because the small spaces involved prevent a breakdown of current that occurs under certain conditions in macromachines However, friction at the microscopic level is found to be higher [9] Efforts are also made to control the properties of materials for obtaining a better residual stress control
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The manufacture of ultra-precision products, such as IC chips and microelectromechanical systems (MEMS), requires clean rooms For instance, photolithography for MEMS and microsystems needs to be performed in a class 10 clean room or one with a better standard Other major products that require a clean-room environment are pharmaceuticals, disc drives, flat panel displays and products concerning the food industry The class number of a clean room designates the air quality in it A class-10 clean room means that the number of dust particles 05 m or larger in a cubic foot of air in the room is less than 10 Most other microfabrication processes can tolerate a clean room of class100 These requirements for clean room air quality are in sharp contrast to those of the air quality of class 5 million in a typical urban environment [6] The ISO also provides the classification of clean rooms based on the precise count levels and the particle size The airborne particulate cleanliness classes (by cubic metre) are defined in ISO 14644-1 as shown in Table 83 Table 84 lists out the ISO clean room standards [19] Table 83
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Class 01 m ISO 1 ISO 2 ISO 3 ISO 4 ISO 5 ISO 6 ISO 7 ISO 8 ISO 9 10 100 1,000 10,000 100,000 1,000,000
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Airborne particulate cleanliness classes (by cubic metre) [19]
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Number of particles per cubic metre by micrometre size 02 m 2 24 237 2,370 23,700 237,000 03 m 10 102 1,020 10,200 102,000 05 m 4 35 352 3,520 35,200 352,000 3,520,000 35,200,000 1 m 5 m
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8 83 832 8,320 83,200 832,000 8,320,000
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29 293 2,930 29,300 293,000
The main functions of a clean room include [20] the following: Provide a filtered supply of air at a sufficient flow rate and with effective flow patterns to reach a specified class of cleanliness Provide filtered outdoor air for occupants and equipments Effectively exhaust unwanted chemicals Maintain a specified clean-room pressure Add or remove moisture to regulate the clean-room humidity Add or remove thermal energy to regulate the clean-room temperature
400 Table 84
Precision Engineering ISO clean-room standards [19]
Title Classification of Air Cleanliness Clean-room Testing for Compliance Methods for Evaluating & Measuring Clean Rooms & Associated Controlled Environments Clean-room Design & Construction Clean-room Operations Terms, Definitions & Units Enhanced Clean Devices Molecular Contamination Biocontamination: Control General Principles Biocontamination: Evaluation & Interpretation of Data Biocontamination: Methodology for Measuring Efficiency of Cleaning Inert Surfaces
ISO document ISO-14644-1 ISO-14644-2 ISO-14644-3 ISO-14644-4 ISO-14644-5 ISO-14644-6 ISO-14644-7 ISO-14644-8 ISO-14698-1 ISO-14698-2 ISO-14698-3
The clean-room flow can be classified into the conventional type of clean-room flow, unidirectional flow, mixed type of clean-room flow and flow in a minienvironment Figure 843 shows the different graphical representations of the clean-room flow The layout is further classified into the ballroom type, service chase type and the minienvironment type as shown in Figure 844
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