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1 Water proof cement plaster (20 mm) 2 State stone slabs (25 mm) 3 Water proof cement (25 mm) 4 RCC retaining wall (300 mm) 5 Bitumen coating 6 Expanded polystyrene (50 mm) 7 Air gap (50 mm) 8 Cement concrete block wall (225 mm) 9 Cement plaster (20 mm)
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Fig 846: Wall insulation of metrology laboratories [21]
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underground laboratories allow for a simpler air-conditioning design and less energy consumption CMTI laboratories are designed with a reinforced monolithic cement concrete floor block isolated and thermally insulated from the surroundings, and an independent shell is constructed over it The expanded polystyrene thermal insulation on all sides ensures that there is no heat flow from the outside to the inside The air conditioning removes the heat generated by the equipment, personnel and the lighting The temperature control is obtained through a large number of air changes and through mixing of air Various air flow patterns such as wall to wall, floor to ceiling, ceiling to floor and combinations are possible The wall to wall flow creates a shadow region on one side of the equipment leading to temperature differentials The floor to ceiling arrangement also creates this effect The ceiling to floor arrangement carries the heat from the lamps downwards There is also a choice between turbulent and laminar flows Turbulent flows are advantageous in terms of maintaining a uniform temperature In CMTI, swirl diffusers with adjustable blades [21] are utilized for distribution of air from the ceiling in a downward direction A certain portion of the returned air is channelled through the air handling luminaries in the ceiling to remove the heat from the lamps, and the major part is returned through the ducts along the walls Chilled water is also circulated through copper pipes embedded in the floor blocks to minimize temperature differentials between the floor and the room space
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1 Senturia, SD, Microsystem Design, Kluwer Academic Publishers, 2001 2 Michalicek, MA, Introduction to Microelectromechanical Systems, Air Force Research Laboratory, New Mexico, 2000 3 Hui, E, Microelectromechanical Systems UCSD <http://www-bsaceecsberkeleyedu/archive/users/hui-elliot/ memshtml> 4 Lee, JB, Introduction to MEMS UTD 5 Jackson, MJ, Microfabrication and Nanomanufacturing Taylor and Francis, USA, 2006 6 Hsu, TR, MEMS and Microsystems Design and Manufacture, McGraw Hill, 2002 7 MEMS and Nanotechnology Clearinghouse, What is MEMS Technology <http://wwwmemsnetorg/mems/> 8 MacDonald, NC, Microelectromechanical Systems (MEMS) Paradigms, Cornell University 9 O Connor, L, MEMS: Microelectromechanical Systems, Mechanical Engineering, American Society of Mechanical Engineers, February 1992 10 Bley, P, The LIGA process for fabrication of three-dimensional microscale structures, Interdisciplinary Science Reviews, 1993, vol 18, no 3 11 Bley, P, Polymers An excellent and increasingly used material for microsystems, SPIE 1999 Symposium on Micromachining and Microfabrication, Santa Clara, California, September 20-22, 1999 12 Keneyasu, M, Kurihara, N, Katogi, K and Tabuchi, K, An advanced engine knock detection module performance higher accurate MBT control and fuel consumption improvement, Proceedings of Transducers 95, Eurosensors IX, 1995
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13 DARPA (Defense Advanced Research Projects Agency), Electronics Technology Office <http:// webext2darpamil/ETO> 14 Helvajian, H and Janson, SW, Microengineering Space Systems, Microengineering Aerospace Systems, American Institute of Aeronautics and Astronautics, Reston, Virginia, 1999 15 Burg, A, Meruani, A, Sandheinrich, B and Wickmann, M, MEMS gyroscopes and their applications, Introduction to Microelectromechanical System 16 Kalpakjian, S and Schmid, SR, Manufacturing Process for Engineering Materials, Prentice Hall, 2003 17 Trimmer, W, A Tutorial of MEMS Micro Fabrication Techniques <http://homeearthlinknet/~trimmerw/ mems/tutorialshtml> 18 Sze, SM, Semiconductor Devices- Physics and Technology, John Wiley and Sons, New York, 1985 19 Hjelmervik, S and Gecsey, J, FS 209E and ISO 14644 Clean Room Classification Standards Pacific Scientific Instruments Company, January 1999 <http://wwwparticlecom/whitepapers_met/cleanroom%20standardshtm> 20 Lei, GTK, Improving and Trouble Shooting Clean Room HVAC System Designs, Fluid Dynamics Solutions, Inc, Clackamas, Oregon 21 Abidin, SZ, Jayaraman, G and Simha, RV, Environmental Control for Precision Engineering Laboratory at CMTI, Central Manufacturing Technology Institute, Bangalore, India 22 Noha, KC, Oha, MD and Lee, SC, A Numerical Study on Airfow and Dynamic Cross-Contamination in the Super Cleanroom for Photolithography Process, Building and Environment, Elsevier, November 24, 2004 23 Yang, SJ and Fu, WS, A Numerical Investigation of Effects of a Moving Operator on Airflow Patterns in a Cleanroom, Building and Environment, Pergamon, July 31, 2001
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