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Preface Acknowledgements 1 Precision Engineering 11 12 13 14 15 16 Introduction to Precision Engineering The Difference between Accuracy and Precision The Need for having a High Precision Developmental Perspective of Machining Precision Four Classes of Achievable Machining Accuracy Normal Machining 161 Gear Manufacture by Normal Machining 17 Precision Machining 171 Machining of Integrated Circuit Chips on a CNC Milling Machine for Failure Analysis 172 Precision Manufacture of Spherical and Aspheric Surfaces on Plastics and Glass 18 High-precision Machining 19 Ultra-precision Machining 191 Ultra-precision Processes and Nanotechnology 110 Thermal Considerations in Precision Engineering 111 References 112 Review Questions
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vii ix 1 1 2 6 6 8 8 12 15 15 17 22 25 27 30 30 31
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Contents 33 33 36 36 37 41 41 43 45 47 48 49 49 50 56 56 58 59 60 65 67 73 75 77 79 80 80 81 82 85 86 86 90 91 93 94
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2 Tool Materials for Precision Machining 21 Introduction 22 Coated Carbides 221 Laminated Carbides 222 CVD Coated Carbides 223 Coating of the First Generation of TiC (Cermets) 224 Coating of the Second Generation of TiC (Cermets) 225 PVD Coated Carbides 23 Ceramics 231 Hot-pressed Ceramics 232 Silicon Nitride Ceramics 233 Whisker Reinforced Ceramics 24 Diamonds 241 Crystallographic Planes 242 Natural Diamond 243 Synthetic Diamonds 244 Polycrystalline Diamond (PCD) 245 Single-crystal Diamond (SPSCD) 246 Diamond Coated Tools 247 Design of Diamond Tools 25 Cubic Boron Nitride (CBN) 251 Coated CBN 26 Tool and Work Material Compatibility 27 References 28 Review Questions 3 Mechanics of Materials Cutting 31 Introduction 32 An Overview of the Turning Operation and Tool Signature 321 Single-point Cutting Tools 33 Mechanics of Conventional Metal Cutting 331 Pure Orthogonal, Semi-orthogonal, Orthogonal and Oblique Cutting 332 Chip Formation and Cutting Forces in Metal Cutting 333 Merchant s Theory 334 Merchant s Shear Angle 335 Merchant s Modified Shear Angle (Bridgman s Theory) 336 Merchant s Strain Equation
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Contents 337 Piispanen s Shear Strain Model (Card Model) 338 A Graphical Method to Construct Merchant s Circle 339 Mechanics of Oblique Cutting Mechanics of Grinding 341 Basic Mechanics of Grinding Material Removal Mechanism 342 Grit Depth of Cut 343 Specific Energy 344 Temperature During Grinding 345 Grinding Wheel Wear 346 Truing and Dressing of Grinding Wheels Material Removal Mechanisms in Brittle Materials 351 Ductile Mode Machining of Hard and Brittle Materials 352 Models for Ductile Mode Machining of Brittle Materials References Review Questions
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xiii 96 96 99 108 108 110 114 116 117 118 120 124 126 138 140 142 142 143 143 144 145 146 146 146 148 150 151 155 159 159 163 165 174 174 180
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4 Advances in Precision Grinding 41 Introduction 42 Grinding Wheel 421 Bonding Materials 422 Abrasive Types 423 Grit Size 424 Grade 425 Structure 426 Concentration 427 Design and Selection of the Grinding Wheel 428 Mounted Wheels 429 Bondless Diamond Grinding Wheel 43 Conventional Grinding 44 Precision Grinding Processes 441 Jig Grinding for IC Chip Manufacturing 442 Precision Grinding with Electrolytic In-process Dressing (ELID) 443 Various Methods for Generating an Aspheric Surface 45 Ultra-Precision Grinding 451 Various Ultra-precision Machines and Their Development 452 Some Applications of Ultra-precision Machining
Contents 46 References 47 Review Questions 182 186 187 187 192 197 197 201 204 212 213 216 216 219 219 220 220 221 221 225 226 227 231 236 237 237 240 241 245 246 250 253 254 254 257
5 Ultra-Precision Machine Elements 51 Introduction 52 Guideways 53 Drive Systems 531 Nut and Screw Transmission 532 Friction Drive 533 Linear Motor Drive 54 Spindle Drive 55 Preferred Numbers 56 References 57 Review Questions 6 Rolling Element, Hydrodynamic and Hydrostatic Bearings 61 Introduction 62 Rolling Element Bearings 621 Principle of Rolling Element Bearings 622 Construction of Rolling Element Bearings 623 Classification of Rolling Element Bearings 624 Application of Rolling Element Bearings 625 Selection of Rolling Element Bearings 626 Fitting of Rolling Element Bearings 627 Bearing Life 63 Lubricated Sliding Bearings 631 Construction of Lubricated Sliding Bearings 632 Principle of Lubrication 633 Principle of Hydrodynamic Bearings 634 Comparison and Selection Between Rolling and Sliding Bearings 635 Hydrodynamic Thrust Bearings 636 Application of Hydrodynamic Bearings 637 Mathematical Approximation of Hydrodynamic Bearings 64 Hydrostatic Bearings 641 Principle of Hydrostatic Lubrication 642 Construction of Hydrostatic Bearings 643 Classification of Hydrostatic Bearings
Contents 644 Operation of a Hydrostatic Bearing System 645 Advantages and Disadvantages of Hydrostatic Bearings 646 Application of Hydrostatic Bearings 647 Mathematical Approximation of Hydrostatic Bearings 648 Design of Hydrostatic Bearings 649 Manufacture of Hydrostatic Bearings 65 Hybrid Fluid Bearings 66 References 67 Review Questions 7 Gas Lubricated Bearings 71 Introduction 72 Aerodynamic Bearings 73 Aerostatic Bearings 731 Principle of Aerostatic Bearings 732 Construction of Aerostatic Bearings 733 Classification of Aerostatic Bearings 734 Operation of Aerostatic Bearing Systems 735 Advantages and Disadvantages of Aerostatic Bearings 736 Application and Principles of Aerostatic Bearings 737 Aerostatic Spindles 738 Mathematical Approximation of Aerostatic Bearings 739 Theory of Aerostatic Lubrication 7310 Design of Aerostatic Journal Bearings 7311 Thrust Bearings 74 Hybrid Gas Bearings 75 Comparison of Bearing Systems 76 Material Selection for Bearings 77 References 78 Review Questions 8 Microelectro-Mechanical Systems (MEMS) 81 82 83 84 85 Introduction Advances in Microelectronics Characteristics and Principles of MEMS Design of MEMS Application of MEMS
xv 259 261 262 264 268 281 281 282 283 287 287 288 289 289 291 293 296 298 301 307 310 312 318 337 345 349 356 361 362 366 366 367 368 372 379
Contents 851 Application of MEMS in Automobiles 852 Application of MEMS in the Health-care Industry 853 Application of MEMS in Defence 854 Application of MEMS in the Aerospace Industry 855 Application of MEMS in Industrial Products 856 Application of MEMS in Consumer Products 857 Application of MEMS in Telecommunications 86 Materials for MEMS 87 MEMS Fabrication and Micromanufacturing Processes 871 Bulk Micromachining 872 Surface Micromachining 873 LIGA Process 88 MEMS and Microsystem Packaging 89 Future of MEMS 810 Clean Rooms 8101 Effects of Various Parameters 8102 The Design and Construction of Clean Rooms 811 References 812 Review Questions Author Index Subject Index 380 384 385 386 386 387 387 387 389 390 393 395 397 398 399 400 404 406 407 408 414
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