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MAHO CNC machining centre for studying failure analysis of IC chips [38] Novel techniques were developed by Venkatesh et al [35] to study the formation of ductile streaks during the Jig (Plano) grinding of glass and Si surfaces using a high-speed air turbine spindle It was found that resinoid diamond wheels gave more ductile streaks than did metal-bonded wheels, but a better form accuracy was obtained with the latter Ductile streaks were obtained more easily with pyrex than with BK 7 glass thus necessitating very little time for polishing Results indicate that the surface roughness of the precision ground Si sample improves with lower feed rates except at the finest depth of cut of 5 m where a higher feed rate improves the finish Ductile streaks also appear at higher feed rates (Figure 421)
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Fig 421: SEM pictures of a ground Si surface consisting of (a) microfractures and (b) grinding streaks [35]
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As can be seen in Figure 334, there are also various shapes of wheel end faces such as pointed, round, flat, and slightly conical The advantage here is that by using a mounted wheel whose end face is slightly conical shaped, the critical depth of cut in grinding can be determined Figure 422 indicates a diamond pin of a 5 mm diameter that was used to grind Pyrex glass The tapered diamond pin resulted in circular areas having fractured and partial ductile surfaces (Figure 422 (b)) From the diamond pin and the grinding geometry, the wheel depth of cut can be seen to be the highest at the centre of the track and gradually decreases to the shoulder As a result, one grinding pass constitutes at least two tracks, one with the fracture and the other with partial ductile streaks In fact, Figure 422 indicates the experimental observation on grinding of Pyrex glass with a 64 m grit diamond pin The actual cone angle of the end surface was measured and found to be approximately 1794 , a requirement for internal grinding pins for easy entry The grinding conditions were 39 m/s cutting speed, 25 mm/min feed rate, and a 10 m depth of cut In Figure 422 (a), y represents the depth of the cut at which transition from brittle to ductile grinding occurs, and thus the corresponding grit depth of cut will be a critical value With the aid of an optical microscope and integrated image analysis software, the width of the tracks can be measured (Figure 422 (c)) whereby y was found to be 7 m
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Fig 422: (a) Exaggerated conicity of the grinding wheel (the actual cone angle will be about 1794 ) (b) Planar
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view of the ground surface whose diameter is less than the wheel diameter, because the depth of cut is less than y The central part despite being fractured is transparent, and the outer part is translucent despite the partial ductile streaks (c) Enlargement of the triangular area O B A in (a) enables the estimation of the critical depth of cut (y ) [39]
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442 Precision Grinding with Electrolytic In-process Dressing (ELID)
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Grinding with superabrasive wheels is an excellent way to produce a precision surface finish on hard and brittle materials To achieve this, superabrasive diamond grits need a higher bonding strength during grinding, which can be offered by metal-bonded and resinoid-bonded wheels However, truing and dressing of the wheels are major problems, as they tend to glaze because of wheel loading These problems can be avoided by dressing periodically, but this interrupted action makes the grinding process very tedious and time consuming A Japanese research group has introduced an effective technique to overcome the poor self-dressing properties of metal bonds, especially cast iron bonds, in the presence of aqueous lubricants Ohmori and Nakagawa [40] have referred to the method as electrolytic in-process dressing (ELID) The basic concept of grinding with ELID is illustrated in Figures 335 It uses an electro-chemical method to remove the metal bonds and properly expose the diamond particles, thereby maintaining the high efficiency of the grinding operation The basic ELID system consists of a metal or cast-iron-bonded diamond grinding wheel, an electrode (copper or graphite), a power supply and an electrolyte as shown in Figure 423
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