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Diazo phototools are the least expensive, and glass is the most expensive. Although the lessexpensive materials have poorer transmission, this property is generally not limiting, except for applications requiring high intensity. Table 26.4 illustrates the impact on exposure time. Edge definition is a major difference among the options, as shown in Fig. 26.12.The photos illustrate that chromium on glass gives the sharpest edge definition. Edge definition is also affected by the pixel size of the phototool plotter and the spot s addressability (see the section on LDI). For applications that use a low-contrast photoresist and poor light collimation, these differences are not measurable on the printed photoresist image or in the patterned conductor. However, for high-density imaging, edge definition is important, as is the dimensional stability of the phototool.
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TABLE 26.4 Comparison of the Optical Transmission of Various Phototool Materials Property Absorbance at 365 nm Transmission at 365 nm % increase in exposure time vs. glass Diazo 0.271 54% 40 Polyester 0.107 54% 13 Glass 0.047 90% 0
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Film dimensions change more rapidly with temperature than glass and are also affected by humidity. Careful control of both temperature and humidity is required throughout the life of a phototool (see Table 26.5).
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TABLE 26.5 Dimensional Stability of Phototool Substrate Materials with Respect to Temperature and Relative Humidity Expansion coefficient, ppm/ C 9.2 3.7 3.2 0.5 18 Expansion coefficient, %RH/ C 0 0 0 0 9
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Substrate Soda lime glass Low-expansion glass Pyrex Quartz Polyester
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Source: Kodak Technical Literature (ACCUMAX 2000) for polyester film; Tables of Physical and Chemical Constants, Longman, London, 1973, p. 254; H. J. Fischbeck and K. H. Fischbeck, Formulas, Facts and Constants, Springer-Verlag, Berlin, 1987, for glass data.
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The durability of the phototool is also important, especially for use in a manual contact printer. Damage depends on phototool handling, the exposure tool, the cleanliness level of the operation, and the surface of the product being contacted. Commonly, glass artwork is usable for 100 to 400 contacts with repair, while film artwork is usable for 20 to 50. For large numbers of the same part, number cost per contact may actually be lower with glass artwork, while for prototype parts, film artwork is ideal. However, the majority of production panels are exposed with film artwork. High-density applications such as chip scale packaging and multichip modules using laminate (MCM-L) may require glass artwork. The requirements of the product determine the type of phototool that should be used. 26.6.4.1.2 Registration. The image is placed on the panel with respect to a point of reference so that the image is well aligned to previous and future features. In multilayer construction, the innerlayer images are aligned front to back for successful lamination and drilling of the plated through holes (PTHs).The outerlayer image is then aligned to the drilled holes. The same considerations are relevant for single-layer boards. Thus, accurate alignment
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FIGURE 26.12 Optical micrograph of the image edge of common phototool materials, 1600 : (a) diazo on polyester; (b) silver on polyester; (c) Cr on glass.
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is clearly part of the imaging process and also depends on knowledge and control of the dimensional stability of the product. The image must be scaled to match the dimension of the board at the exposure step; for multilayer structures with several photolithographic steps, a series of dimensional measurements are required prior to product manufacture. Mechanical registration entails the use of fixed pins or other mechanical devices to hold the phototool and the panel in place during exposure. The actual configuration of the pins and their shape varies. Both two- and three-point systems are used. The three-point systems well define the center location since they are located at the extremes of the area to be patterned.
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