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Figure 1-47 Exploded view of an angular displacement transducer (ADT) based on a differential variable capacitor.
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The base is the mounting platform for the transducer assembly. It contains the axial ball bearing that supports the shaft to which the rotor is fastened. The base also supports the transmitting board, which contains a metal surface that forms the lower plate of the differential capacitor. The semicircular metal rotor mounted on the shaft is the variable plate or rotor of the capacitor. Positioned above the rotor is the receiving board containing two separate semicircular metal sectors on its lower surface. The board acts as the receiver for the AC signal that has been modulated by the capacitance difference between the plates caused by rotor rotation. An electronics circuit board mounted on top of the assembly contains the oscillator, demodulator, and filtering circuitry. The ADT is powered by DC, and its output is a DC signal that is proportional to angular displacement. The cup-shaped housing encloses the entire assembly, and the base forms a secure cap. DC voltage is applied to the input terminals of the ADT to power the oscillator, which generates a 400- to 500-kHz voltage that is applied across the transmitting and receiving stator plates. The receiving plates are at virtual ground, and the rotor is at true ground. The capacitance value between the transmitting and receiving plates remains constant,
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but the capacitance between the separate receiving plates varies with rotor position. A null point is obtained when the rotor is positioned under equal areas of the receiving stator plates. In that position, the capacitance between the transmitting stator plate and the receiving stator plates will be equal, and there will be no output voltage. However, as the rotor moves clockwise or counterclockwise, the capacitance between the transmitting plate and one of the receiving plates will be greater than it is between the other receiving plate. As a result, after demodulation, the differential output DC voltage will be proportional to the angular distance the rotor moved from the null point.
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Inductosyns
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The Inductosyn is a proprietary AC sensor that generates position feedback signals that are similar to those from a resolver. There are rotary and linear Inductosyns. Much smaller than a resolver, a rotary Inductosyn is an assembly of a scale and slider on insulating substrates in a loop. When the scale is energized with AC, the voltage couples into the two slider windings and induces voltages proportional to the sine and cosine of the slider spacing within a cyclic pitch. An Inductosyn-to-digital (I/D) converter, similar to a resolver-todigital (R/D) converter, is needed to convert these signals into a digital format. A typical rotary Inductosyn with 360 cyclic pitches per rotation can resolve a total of 1,474,560 sectors for each resolution. This corresponds to an angular rotation of less than 0.9 arc-s. This angular information in a digital format is sent to the motion controller.
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Laser interferometers provide the most accurate position feedback for servosystems. They offer very high resolution (to 1.24 nm), noncontact measurement, a high update rate, and intrinsic accuracies of up to 0.02 ppm. They can be used in servosystems either as passive position readouts or as active feedback sensors in a position servo loop. The laser beam path can be precisely aligned to coincide with the load or a specific point being measured, eliminating or greatly reducing Abbe error. A single-axis system based on the Michaelson interferometer is illustrated in Figure 1-48. It consists of a helium neon laser, a polarizing beam splitter with a stationary retroreflector, a moving retroreflector that
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Motor and Motion Control Systems
Figure 1-48 Diagram of a laser interferometer for position feedback that combines high resolution with noncontact sensing, high update rates, and accuracies of 0.02 ppm.
can be mounted on the object whose position is to be measured, and a photodetector, typically a photodiode. Light from the laser is directed toward the polarizing beam splitter, which contains a partially reflecting mirror. Part of the laser beam goes straight through the polarizing beam splitter, and part of the laser beam is reflected. The part that goes straight through the beam splitter reaches the moving reflectometer, which reflects it back to the beam splitter, that passes it on to the photodetector. The part of the beam that is reflected by the beam splitter reaches the stationary retroreflector, a fixed distance away. The retroreflector reflects it back to the beam splitter before it is also reflected into the photodetector. As a result, the two reflected laser beams strike the photodetector, which converts the combination of the two light beams into an electrical signal. Because of the way laser light beams interact, the output of the detector depends on a difference in the distances traveled by the two laser beams. Because both light beams travel the same distance from the laser to the beam splitter and from the beam splitter to the photodetector, these distances are not involved in position measurement. The laser interferometer measurement depends only on the difference in distance between the round trip laser beam travel from the beam splitter to the moving retroreflector and the fixed round trip distance of laser beam travel from the beam splitter to the stationary retroreflector. If these two distances are exactly the same, the two light beams will recombine in phase at the photodetector, which will produce a high electrical output. This event can be viewed on a video display as a bright light fringe. However, if the difference between the distances is as short as one-quarter of the laser s wavelength, the light beams will combine out-of-phase, interfering with each other so that there will be no electrical output from the photodetector and no video output on the display, a condition called a dark fringe.
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