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free .net barcode reader library Precision Engineering in Software
Precision Engineering Reading DataMatrix In None Using Barcode Control SDK for Software Control to generate, create, read, scan barcode image in Software applications. DataMatrix Maker In None Using Barcode creation for Software Control to generate, create Data Matrix image in Software applications. behaviour of microsystems The scaling of the geometry involves the laws of physics For parallel plate capacitor microactuators, the relationships include ECC200 Reader In None Using Barcode decoder for Software Control to read, scan read, scan image in Software applications. Draw Data Matrix In Visual C#.NET Using Barcode creation for VS .NET Control to generate, create ECC200 image in VS .NET applications. 2 2 V Ls b = o 2 3 6 x a 1 a
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Generating EAN13 In Java Using Barcode generation for Java Control to generate, create EAN13 image in Java applications. UPCA Maker In None Using Barcode generator for Microsoft Excel Control to generate, create GS1  12 image in Microsoft Excel applications. Fig 810: Electrostatic actuation of a charged parallel plate [8] Create ANSI/AIM Code 39 In Java Using Barcode generator for Java Control to generate, create Code 3 of 9 image in Java applications. Bar Code Decoder In VB.NET Using Barcode Control SDK for Visual Studio .NET Control to generate, create, read, scan barcode image in .NET framework applications. Microelectromechanical Systems (MEMS) UCC  12 Printer In Java Using Barcode generation for Java Control to generate, create EAN128 image in Java applications. Printing Barcode In None Using Barcode generator for Font Control to generate, create bar code image in Font applications. For example, silicon has a density of 2300 kg/m3 and a modulus of elasticity of 170 GPa The velocity of sound for silicon is approximately 8500 m/sec The spring and mass system for MEMS is also governed by Newton s second law and Hooke s law Figure 812 shows Newton s second law, whereas Figure 813 illustrates Hooke s law For a condition with no friction and no damping, the following relation is obtained: Fapp + Fsp = 0 & mx& = kx Fig 811: Electrostatic actuation [8] 1 2 && kx mx + kx = 0 2 The electrical analogy of the spring mass system is given as
Vp = Potential Energy =
Vke = Kinetic Energy = Energy stored in a magnetic field, Vm = Energy stored in an electric field, VE = 1 2 & m (x ) 2 1 2 LI 2
Fig 811: Electrostatic actuation [8] 1 2 CV 2 where L is the inductor and C is the capacitor The structure stiffness is determined from the EulerBernoulli equation which is given as EI d 2x = M dy 2 Fig 812: Illustration of Newton s second law
[8] where E is the modulus of elasticity, I is the area moment of inertia and M is the moment on the beam Not only is this equation used as boundary conditions that must be satisfied but it is also used to determine the spring constant of the beam The graphical representation of the EulerBernoulli equation is shown in Figure 814 The area moment of inertia is given with respect to Figure 815 The beam cross sectional area is the product of a into b Fig 813: Illustration of Hooke s law [8] Precision Engineering
Moment (M ) > 0 Tension Neutral axis
Compression M M 0
Moment (M ) Beam "springs" back to unstressed position
Fig 814: A graphical representation of the EulerBernoulli solution [8] I xx =
b 2 y 2dA
= y 2ady =
b 2 ab3 12
Iyy =
a3b 12
Example: Cantilever Beam It is given that a is the thickness of the beam, b is the width of the beam and l is the length of the beam The mass of the beam is given as m = rabl, and the moment is given as M(l) = 0 and M(0) = Fl The problem is solved by approximating the cantilever beam as a mass on a spring The stiffness from the Euler Bernoulli equations is utilized, and the movement should be approximated w = Fig 815: The area moment of inertia
Stiffness = Moving mass
ky meff
meff = 023 mbeam
Microelectromechanical Systems (MEMS) Fig 816: A cantilever beam [8] From the Euler Bernoulli equation, the following can be derived: EI zz
d2 y = (Fx Fl ) = F (l x) dx2 dy x2 = F lx + c1 dx 2
EI zz
lx 2 x 3 EIzz y = F + c1x + c2 6 2 Applying the boundary conditions, dy dx
= 0, c1 = 0
x =0 y = 0 @ x = 0, c2 = 0
lx 2 x 3 EIzz y = F 6 2
Precision Engineering
Fig 817: Effective mass of a cantilever beam [8] Evaluating at x = l, l3 l3 3l 3 l 3 EIzz y(l ) = F = F 6 2 6 6
F y(l ) = EI zz l3 3
Utilizing Hooke s Law, F = ky y ky = ky y =
3EI zz l3
ky = E
a3b 4l 3
ky meff
a 3b E 3 4l 3 abl 8
The structure resonant frequency of the cantilever beam is given as f =
1 2 1 2 Microelectromechanical Systems (MEMS) 2 1 E 2 a2 a f = = 3 vsound 2 4 2 3 l 2 l It can be concluded that MacDonald s resonant frequency scaling law is a f = vsound 2 l
85 APPLICATION
MEMS
MEMS are used in a variety of applications such as devices to deploy automobile airbags, video projection via a million individually steerable mirrors, microoptical systems for fibreoptic communications, superfast electrophoresis systems for DNA separation, microrobots, microtweezers and neural probes Basically, the application of MEMS can be found in a few areas such as the automotive industry, aerospace industry, healthcare industry, industrial products, consumer product industry and telecommunications industry Examples of MEMS devices or components produced in recent years include microgears, micromotors, microturbines and microoptical components Figure 818 shows a gear that is smaller than an ant s head with a pitch of the order of 100 m The micromotor shown in Figure 819 consists of a rotor, a stator and the torque transmission gear Both the microgear and micromotor are produced by the LIGA process which will be introduced later Microturbines such as the ones shown in Figure 820 are used to generate power The maximum rotational speed reaches 150,000

