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855 Application of MEMS in Industrial Products
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One of the most important MEMS devices in industrial applications is none other than the manufacturing process sensors These process pressure transmitters are consumed at a rate of about 200,000 units per year [6] In addition, some MEMS devices serve as sensors for hydraulic systems, paint spray, agricultural sprays, refrigeration systems, heating, ventilation and air conditioning systems, water level controls, digital micromirror devices, grating light valves, optical interconnects and telephone cable leaks In chemical applications, they are used as lab-on-a-chip and as microreactors
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[4] Micromachined turbine engines, MEMS power generators and fuel cells are used in power generation
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856 Application of MEMS in Consumer Products
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Application of MEMS and microsystems in consumer products can be seen in scuba diving watches and computers, bicycle components, fitness gear using hydraulics, washers with water-level controls, sport shoes with automatic cushioning control, digital tyre pressure gages, vacuum cleaners with automatic adjustment of brush beaters and smart toys [6] In computer data storage, there are shock sensors for hard disc drives and new data storage mechanisms [4] As consumer products become more and more sophisticated, MEMS devices will be relied upon even more, and it will not come as a surprise if almost every consumer product is incorporated with an MEMS device
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Application of MEMS and microsystems in consumer products can be seen in optical switching and fibre-optic couplings, radiofrequency switches and tunable resonators (Figure 829) [4] High frequency circuits will benefit considerably from the advent of the RF-MEMS technology Electrical components such as inductors and tunable capacitors can be significantly improved compared to their integrated counterparts if they are made using MEMS and nanotechnology With the integration of such components, the performance of communication circuits will improve, while the total circuit area, power consumption and cost will be reduced In addition, the mechanical switch, as developed by several research groups, is a key component with a huge potential in various microwave circuits [7] Fig 829: An MEMS tunable bank [4] Motorola has introduced a pressure sensor to merge signal conditioning with mechanical sensing on a single chip The pressure sensor is well suited to be applied in microprocessor-based systems that have analogue to digital inputs [9]
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The choice of materials in the manufacture of a microsystem is determined by microfabrication constraints Microelectronics use various conductors and insulators made from inorganic materials such as silicon, silicon dioxide, silicon nitride, aluminium, tungsten and certain polymers The microfabrication of MEMS extends beyond conventional microelectronics processes, and this allows
Precision Engineering
for a wider range of materials [1] The choice of the material will depend on the matching of the properties of the material with the intended application As MEMS mainly deals with thin-film materials, the properties of the thin-film materials should be considered as they may differ from the properties of the bulk material The substrate in a microsystem is a flat macroscopic object on which microfabrication processes take place It also serves as a signal transducer besides supporting other transducers that convert mechanical actions to electrical outputs In semiconductors, the substrate is a single crystal cut into slices from a larger piece known as a wafer which originates from an ingot (Figure 830) [6] However, microsystems can be made of either active substrate materials or passive substrate materials Active substrate materials are primarily used for sensors and actuators Fig 830: A silicon wafer [4] in microsystems and other MEMS components Typical substrate materials used are silicon (Si), germanium (Ge), gallium arsenide (GaAs), quartz, glasses, metals, ceramics and polymers [4] As most of the materials are semiconductors, they can function either as a conductor or an insulator when the need arises Basically, these substrate materials have a cubic crystal lattice with a tetrahedral atomic bond which gives dimensional stability and is relatively insensitive to the environment [16] Of the various substrate materials, silicon is the most dominant material as it is possible to integrate circuits with MEMS devices The single-crystal silicon is generally used because it is widely available In addition, it is mechanically stable and serves as an ideal lightweight structural material Furthermore, as it has a melting point of 1,400 C, silicon is dimensionally stable even at elevated temperatures Silicon also has a low thermal expansion coefficient With virtually no mechanical hysteresis, it is suitable for use in sensors and actuators Silicon also allows a greater flexibility in the designing and manufacturing process [6] Silicon compounds such as silicon dioxide (SiO2), silicon carbide (SiC) and silicon nitride (Si3N4) are also used in making MEMS and microsystems In polycrystalline form, silicon can also be deposited onto silicon substrates by low pressure chemical vapour deposition (CVD) technology which is suitable for surface micromachining Piezoelectric crystals are one of the most common non-semiconducting materials Generally, piezoelectric crystals are solid ceramics, and they are capable of converting mechanical energy into electronic signals and vice versa Polymers which include plastics, adhesives, Plexiglas and Lucite are also used in the manufacture of MEMS and microsystems Polymers are made up of long chains of organic molecules which are mainly composed of hydrocarbons Photoresist polymers are used to produce masks for
Microelectro-mechanical Systems (MEMS)
photolithography or prime moulds for the LIGA process Conductive polymers can serve as organic substrates for MEMS and microsystems Polymers are also widely used as electromagnetic interference (EMI) and radiofrequency interference (RFI) shields in microsystems More applications of polymers can be obtained from the work of Hsu [6] and Bley [11]
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