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Ultra-precision Machine Elements
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machine components spindle: aerostatic ball bearing hydrostatic work spindle drive chucking device tool measurement cross slide: aerostatic needle bearing hydrostatic food forward drives grating scales food forward spindles
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Developed/ Manufactured by: MF Elmoldingen SKF ZOLLERN Kessler/Bosch AN FORKARDT BENZINGER IPT SKF LINEARSYSTEME ZOLLERN Bosch AN HEIDENHAIN STAR BOLEY/Stoinmeyer SKF-Transroll A Mannesmann BOSCH NC Sauter BENZINGER BOLEY BEHR
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NC-controller lurrel rotary lable machine bed
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Fig 53: Components of a high-precision lathe [3]
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temperature control
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Fig 54: Ultra-precision (a) turning and (b) grinding machines
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spindle has a bidirectional air-bearing spindle with a vacuum and air feed through the shaft It is driven by an integral brushless DC drive motor with a speed range of 10 10,000 rpm [4] This machine is capable of performing aspheric grinding, diamond turning and linear grooving
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Fig 55: A Precitech Nanoform 350 [4] Fig 56: The T-shaped hydrostatic slideway design
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for the machine in the previous figure [4]
Figure 57 shows one of the ultra-precision lathes produced by Moore Precision Tools In terms of construction, it is very similar to the machine discussed previously The machine design utilizes a hydrostatic linear axis (Figure 58), linear motor, air bearing spindle and granite machine base The machine is able to achieve a resolution of 34 pm and a rotary error motion of less than 25 nm [5]
Fig 57:
A Moore Nanotech 350UPL ultraprecision single-point turning lathe [5]
Fig 58: A side axis hydrostatic oil bearing [5]
Ultra-precision Machine Elements
It is interesting to follow the evolution of various components from conventional lathes to ultra-precision machines The machine base started off with cast iron as it has good damping characteristics and the ability to retain lubricants As the requirements increased, the use of durobar bedways mounted on granite and epoxy granite became common especially in ultra-precision applications The natural granite base ensures maximum rigidity and thermal stability The base is isolated from the frame by solid vibration isolation supports while the machine frame is supported by levelling type rubber isolation supports (Figure 59) The combination of this arrangement damps out any vibration to ensure excellent precision Slide bearings have evolved from roller bearings, air bearings, air and magnet combination bearings to the current technology of oil hydrostatic bearings in ultra-precision machines High-grade Fig 59: A granite base with isolation mounts [4] roller bearings are also used in certain machines so that the required movement as shown in Figure 54 (b) is obtained The current spindle bearings mostly use aerostatic bearings and occasionally oil hydrostatic bearings An electric motor or an air turbine can drive the spindles, with the latter being in the development stage of spindle systems that are used in ultra-precision machining applications Most ultra-precision spindles utilize the integral shaft technology, which does not require any coupling between the rotor and the spindle This allows for a higher stiffness and reduces vibration The principle of hydrostatic bearings is introduced in 6, whereas that of aerostatic bearings is dealt with in 7 Conventional machines have either a lead screw drive or a ball screw drive Further evolution took place with the introduction initially of friction drives and recently of linear motor drives that are now widely used for ultra-precision machines The principles behind these drive systems are discussed in a later section Finally, the workholding system has changed from the three-jaw chuck, which is commonly used in the conventional lathe to the vacuum chuck in ultra-precision machines (Figure 510 and Figure 511) The vacuum system for the spindle is supplied complete with an air operated vacuum generator (Venturi type) and the necessary piping, valves and gauging The vacuum chuck is of a high-quality surface finish, which is needed for the application of a vacuum The workpieces are usually attached to the vacuum chuck using adhesives or fixtures Conventional chucks are not used because the excessive forces associated with them may cause distortion Collets and diaphragm chucks can also be used Collets are still being employed to help the grinding spindle hold the grinding attachment The feedback system evolves from the rotary encoder to the laser scale All the differences in machine elements and components mainly serve to support the higher requirements of accuracy, tolerance, stiffness and speed associated with ultra-precision applications
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