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Precision Engineering
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Fig 18: A schematic illustration of gear generation in a gear shaper using a pinion-shaped cutter, which
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reciprocates vertically [6]
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only be performed on gears with a hardness of 40 HRC or lower Although the tools are expensive and special machines are necessary, shaving is a rapid and the most commonly used process for gear finishing It produces gear teeth with an improved surface finish and accuracy of the tooth profile
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Fig 19: A high-precision gear-shaving cutter used to finish a gear [8]
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Shaved gears may subsequently be heat-treated and ground to achieve an improved hardness, wear resistance and accurate tooth profile
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17 PRECISION MACHINING
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The two processes that are used in precision machining are diamond grinding of Integrated Circuit (IC) chips and precision manufacture of spherical and aspherical surfaces on plastics and glass
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Machining of Integrated Circuit Chips on a CNC Milling Machine for Failure Analysis
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The grinding of a silicon wafer (Integrated Circuit Chips) using a CNC milling machine is a precision machining process Figure 110 shows an IC silicon chip before and after grinding it on a MAHO CNC vertical milling machine (Figure 111) Conventional surface grinding techniques using large diameter wheels may not be appropriate for machining thin wafer IC silicon dies, as the force will likely damage the capacitors and transistors contained on the chip Non-traditional focused ion beam machining may not work as the heat generated might damage the transistors Also, an end-milling technique using small diameter wheels at the maximum speed of a conventional milling centre is often not fast enough to minimize cutting forces These considerations have necessitated the use of an air driven ultra-precision high-speed jig
Fig 110: Integrated circuit (IC) chips (a) before and (b) after precision grinding [9]
Precision Engineering
grinder attachment on the MAHO CNC milling machine shown in Figure 111 to surface grind IC silicon chips The close-up view of the machining set-up for the grinding of small areas on silicon is shown in Figure 112 After the main spindle of the 3-axis MAHO CNC vertical-spindle milling machine is made to stop, the ultra-precision high-speed jig grinder (NSK PLANET 1500) is attached onto the machine s main spindle and air is supplied to the air motor from an air supply kit The air supply is maintained at 4 kgf/cm2 (04 MPa), giving 100,000 10% rpm, based on the speed tests conducted using a non-contact digital tachometer The machining makes it possible to obtain a good quality surface finish with a Ra value as low as 100 nanometers
Fig 111: A MAHO CNC vertical milling machine used for the precision grinding of IC chips
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Planet 1500 Jig Grinder Air supply hose Resin grinding pin
Dynamometer
Fig 112: The close-up view of the machining set-up used for the precision grinding of IC silicon chips [9]
Using the same machining set-up as in Figure 112, it has been possible to precision grind Pyrex glass [10] (Figure 113) and BK-7 glass [11] (Figure 114) The machining operations have generated good quality surface finishes
Precision Manufacture of Spherical and Aspheric Surfaces on Plastics and Glass [12]
The manufacture of surfaces that are used for ophthalmic purposes (made of glass) and for enhancing night vision (made of silicon and germanium) essentially involve precision machining processes [13] The tolerance for form is of the order of 8 m, but the surface finish for cosmetic reasons is of the order of 3 nm Precision versus ophthalmic lenses Optical surfaces are mainly required for manufacturing two categories of products, viz precision optics and ophthalmic optics The former requires the highest accuracy with regard to the contour of the optical surface (Figure 115) The requirements for the latter which concerns manufacture of spectacles are however less stringent with regard to the contour, but there is a demand for the cosmetic
Precision Engineering
Millimeter
Millimeter
Fig 113:
Precision machined surfaces of pyrex glass (a) surface ground using a resin bonded grinding pin, (b) surface ground using a resin bonded cup wheel, and (c) a polished surface [10]
Fig 114:
The precision ground surface of BK-7 glass made using a resin bonded grinding pin [11] The surface consists of partial ductile streaks and microfractures
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